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发信人: hitter (请稍后...涅磐中), 信区: METech
标 题: 一本好书关于MEMS
发信站: 哈工大紫丁香 (2004年01月18日15:46:11 星期天), 站内信件
Author Santos, Hector J. de los.
Title Introduction to microelectromechanical (MEM) microwave systems / Hecto
r J. De Los Santos.
Publisher Boston : Artech House, c1999.
LOCATION CALL NO. STATUS
UL TK7876 .S28 1999 DUE 13-12-00
Preface
1 Microelectromechanical Systems 1
2 Fundamental MEMS Device Physics 25
3 Fundamental MEMS Devices: The MEM Switch 57
4 Fundamental MEMS Devices: The MEM Resonator 81
5 Microwave MEMS Applications 107
6 MEMS-Based Microwave Circuits and Systems 159
App. A Surface Macromachining Process 197
Glossary 207
About the Author 209
Index 211
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Series Artech House microwave library
MEMS--Microelectromechanical systems series
Artech House microelectromechanical systems library.
Subject Microwave devices.
Microelectromechanical systems.
Note Includes bibliographical references and index.
Descript xiii, 217 p. : ill. ; 24 cm.
ISBN 089006282X (alk. paper)
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